Shafiei S M M,  Divandari M,  Boutorabi S M A,  Naghizadeh. COMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD.  IJMSE 2015; 12 (2) :47-55
URL: 
http://ijmse.iust.ac.ir/article-1-802-en.html     
                     
                    
                    
                    
					 
					
                 
                
                    
                    
                    
                    
                    
                    
                    Abstract:       (27199 Views)
                    
                    
                    In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour
deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness
gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure
and  phase  of  the  films  were  investigated  by  X-ray  diffraction.  Atomic  force  microscopy  and  scanning  electron
microscopy were employed to observe the morphology and structure of the films. The TiCN layer exhibited a columnar
structure. The adhesion force between the film and the tool steel substrate was 30.8 MPa for TiN/TiCN and 25.4 MPa
for PN/TiCN film determined by pull off tests. The hardness of TiN/TiCN film was 12.75 GPa while it was 5.4 GPa for
PN/TiCN film, respectively. The improvement of the adhesion in TiN/TiCN was attributed to a less gradient hardness
configuration. In addition, the mean friction coefficients of the films were about 0.2 for TiN/TiCN and 0.3 for PN/TiCN
film determined by nanoindentation tests.
                    
                    
                    
                    
                    
                    Type of Study:  
Research Paper |